Abstract
Along with the development of high definition televisions (HD-TVs), some high density optical discs are demanded to have a capacity of up to 25 Gbytes on a single layer at a single surface. The capacity on single layer may even reach up to 100 Gbytes in the near future, which requires the size of recording to be minimized to less than 100 nm. In this study, ultra high resolution patterns (<100 nm) formation by conventional laser beam recorder using the inorganic spin-coatable photoresist and without additional development or etching process is demonstrated. The recording spot size of laser beam recorder (LBR) can be reduced effectively by using this spin coatable inorganic photoresist.
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