Abstract

We propose a method to generate spherical micro-mirror by anodic bonding. A flat silicon plate is bent with fulcrum to form a spherical shape by anodic bonding. Convex spherical surface is generated inside the fulcrum by the bending moment generated in circumference of micro-mirror. Due to the bent surface of silicon plate, a smooth spherical surface is obtained. The focal length is in the range form 0.4mm to 1.6mm for the fulcrum diameters from 100µm to 400µm. The fabricated micro-mirror is also used as mold for the replication of micro polymer lens. The surface profile of micro-mirror is transferred to the polymer replica with a high accuracy.

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