Spherical oscillator gauge with field emission cold cathode

Abstract

The spherical oscillator gauge with field emission cold cathode has been successfully developed on the basis of many experiments and theoretical calculations with a computer. It basically keeps the advantage of the high sensitivity (K=15 Pa−1) of an oscillator gauge. The incident electrons move in oscillatory mode and effectively restrain their trajectory. The resulting ion beam is focused and collected. Successfully applying the field emission code cathode to the spherical oscillator gauge is the key step of solving the problem in extremely high-vacuum measurement.