Spherical mirror estimation with phase diversity method

Abstract

In order to verify the phase diversity wavefront detector system by using its own light source to complete the wavefront estimation task independently, this paper sets up estimation spherical mirror shape of experiment platform with the method of phase diversity. Phase diverisity method collects shorter exposure image at the same time in the focal plane and away from the focal plane, calculates the distribution of wavefront solutions and recovers the target based on known defocus, so as to realize the estimation of large mirror aberration. In order to further validate the phase diversity measurement method, the phase diversity measurement results with high accuracy ZYGO interferometer measurement results are compared. Experimental results demonstrate that agreement is obtained among the errors distribution, PV value and RMS value of ZYGO interferometer, so the phase diversity method can effectively estimate the mirror aberration, which shows the feasibility and accuracy of phase diversity method.