Abstract
Probes with spherical couplings are widely used to measure microstructures with a high aspect ratio. The measurement accuracy of spherical coupling fibre probes is limited by the low stability and signal-to-noise ratio of the output spot. This paper presents a specially designed probe with a polished spherical coupler and micro-axicon lensed output fibre. The effectiveness of the probe was verified experimentally. Compared to a common spherical coupling fibre probe, the proposed probe improves the signal-to-noise ratio of the output spot by 42.95%, the stability of the spot by 36%, and the resolution from 30 nm to 10 nm (by 66%).
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