Abstract
We have developed a method to obtain a data cube using a semi-parallel detection scheme and an electrostatic hemispherical analyzer (HSA) with multi-channel detection. By improving the Auger intensity map measurement scheme, the number of detector energy sweeps is reduced, and faster measurement is achieved. The gain differences among the detection channel are corrected by post-processing, and a data cube of Auger electron spectra is constructed. A data cube was obtained for an example of a sample with a non-flat surface, lead-free solder. It was demonstrated to be possible to extract spectra from any position within the measurement area and create the elemental distribution maps.
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