Abstract
Abstract Emission spectroscopy is a means for in-situ diagnostics of plasma reactors giving information upon the relative densities of radiative active species. It is shown in this review how to determine gas temperature from rotational spectra and to obtain the ground-state densities of active species from the actinometry method and from chemiluminescent reactions in flowing reactive gases. Correlations are given between the densities of active species and the composition of nitrided layers in Ar-N2-H2 and Ar-N2-CH4 post-discharge reactors.
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