Abstract
SynopsisWe report on the result of an extensive study of the extreme ultraviolet (EUV) and soft x-ray spectra from laser produced plasmas of a number of medium and high Z metals undertaken to identify potential sources for use with multilayer mirrors as sources for lithography and water window imaging and cell tomography.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have