Abstract
A two-step procedure, involving radical-initiated chlorination of the Si surface with PCl5 followed by reaction of the chlorinated surface with alkyl-Grignard or alkyl-lithium reagents, has been developed to functionalize crystalline (111)-oriented H-terminated Si surfaces. The surface chemistry that accompanies these reaction steps has been investigated using X-ray photoelectron spectroscopy (XPS), Auger electron spectroscopy (AES), temperature programmed desorption spectroscopy (TPDS), high-resolution electron energy loss spectroscopy (HREELS), infrared (IR) spectroscopy in both glancing transmission (TIR) and attenuated total multiple internal reflection (ATR) modes, ellipsometry, and contact angle goniometry. The XPS data show the appearance of the Cl signal after exposure to PCl5 and show its removal, and concomitant appearance of a C 1s signal, after the alkylation step. Auger electron spectra, in combination with TPD spectroscopy, demonstrate the presence of Cl after the chlorination process and it...
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