Abstract
Atmospheric-pressure microwave induced N2 plasma is diagnosed by optical emission spectroscopy with respect to the plasma gas temperature. The spectroscopic measurement of plasma gas temperature is discussed with respect to the spectral line broadening of Ar I and the various emission rotational–vibrational band systems of N2(B-A), N2(C-B) and It is found that the Boltzmann plot of the selective spectral lines from at 391.4 nm is preferable to others with an accuracy better than 5% for an atmospheric-pressure plasma of high gas temperature. On the basis of the thermal balance equation, the dependences of the plasma gas temperature on the absorbed power, the gas flow rate, and the gas composition are investigated experimentally with photographs recording the plasma morphology.
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