Abstract
A new diagnostic method for measurement of the kinetic energy of sputtered boron in plasma using spectroscopic technique has been developed. Boron is sputtered by plasma ions produced by electron cyclotron resonance discharge. Line emissions from the borons are measured in directions both parallel and perpendicular to the boron moving axis using a compact monochromator. Observed emission profiles are analyzed by means of non-linear least square fitting and E peak , at which the resultant profile h M ( E z ) has a peak value, is inferred, where surface binding energy U s , is nearly equal to 4 × E peak . The values E peak of the boron sputtered by helium, neon, and argon ions with energy of 2 keV are 1.5–2.0 eV, 0.95–1.3 eV and 1.5–1.7 eV, respectively.
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