Abstract
The paper aims to provide spectroscopic ellipsometry technique as a tool for sensor materials studies. The principles of measurement, the ellipsometric data evaluation and the standard rotating analyzer configuration of the ellipsometric instrument are introduced. The possibilities and the limitations of spectroscopic ellipsometry technique for material studies attractive from the point of view of optoelectronic sensors and micro electro-mechanical sensors and actuators applications are discussed. Studies of composition and the Ce3+ doping level for ferroelectric strontium barium niobate crystals are presented as an example of possible non-straightforward application of this technique.
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