Abstract
Anisotropic optical properties are investigated on β-Ga2O3 films and a single crystal by spectroscopic ellipsometry measurements. The films grown on (0001) α-Al2O3 contain threefold in-plane rotational domains, and the refractive index and absorption coefficient α obtained by assuming an isotropic material are found to be smaller than those in the single crystal. By measuring the off-normal transmission ellipsometry spectra of the (010) β-Ga2O3 substrate, the optical anisotropy in a biaxial crystal as well as the gradual increase in α are recognized as origins of the scattering in optically determined bandgap energies.
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