Abstract
AbstractTo clarify optical properties of DLC‐Si film, we have studied the change in optical constants of the DLC‐Si films as a function of the Si content using spectroscopic ellipsometry. Using the 4 layered structure model (substrate/interface/film/surface roughness/adsorbed water/air), the thickness of each layer and the parameters of the Tauc‐Lorentz oscillator of the film were estimated. The calculated spectra agreed well with the measured one using the layered model with adsorbed water on the DLC‐Si films, compared to the model without water. The thickness of the adsorbed water was in the range from 1nm to 4nm on the DLC‐Si films. However, there was no adsorbed water on the DLC film. This fact is consistent with the larger content of silanol (Si‐OH) measured by the derivatization‐XPS of the DLC‐Si films, compared to that of the DLC film. We have clarified that the refractive index increased at the broad range of 200‐850 nm, the extinction coefficient at the broad range of 200‐1700 nm decreased with an increase in the Si content of the DLC‐Si films. (© 2008 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)
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