Abstract
Pd thin films grown by atomic layer deposition have been studied through spectroscopic ellipsometer with Bruggeman effective medium approximation (B-EMA) model to evaluate the optical properties, thickness and Pd coverage of the films. For the fitting results of thickness, mean square error increases with the gain of ALD cycles. At smaller Pd ALD cycles less than 400, the better fitting results of Pd coverage were obtained compared with Maxwell-Garnett effective medium approximation. It verifies the B-EMA is better for fitting samples with smaller filling fractions. Our study can be extended to characterize other thin films.
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