Abstract
Fourier transform infrared (FT-IR) and broad band ultraviolet (UV) absorption spectroscopy diagnostics were applied to get information on the reaction products and especially the CF2 absolute densities in dielectric barrier discharge (DBD) remote plasma. From the above-mentioned diagnostics methods only stable products in a DBD remote plasma could be identified. The spectroscopic analysis was performed in the volume which is several millimetres (up to 10 mm) far away from the active zone of the DBD. Atomic content and cross-linking effects of fluorocarbon polymer films deposited on silicon wafer were analysed by applying of X-ray photoelectron spectroscopy (XPS) and FT-IR absorption spectroscopy.
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