Abstract
We present the results of an optical emission spectroscopy and electric study of segmented micro hollow gas discharge source (SMHGD) operating at atmospheric pressure in DC regime. This microdis- charge source with 1 mm discharge channel consists of five metal discs separated by alumina. Three central discs are made of copper while stainless steel was used for the cathode and anode. In order to perform side on measurements, 1.5 mm diameter side hole was drilled through central copper disc. The electron temperature (Te), gas temperature (Tg) and electron number density (Ne) were measured in argon, argon- hydrogen and helium SMHGDs operating in the voltage range (220 to 475) V and currents 40 mA, 60 mA and 80 mA. Boltzmann plots of relative Ar I and He I line intensities were used to measure Te = (3700- 5500) K in argon and (2500-2800) K in helium SMHGDs. Same technique is applied to N2 (C 3 Πu-B 3 Πg) band to measure Tg in the range (700-900) K in Ar and He and (1400-1600) K in Ar-H2 mixture. Line profiles of hydrogen the Hβ line in argon and the ratio of He I 447.1 nm line intensity and its forbid- den component in helium are employed to determine Ne ≈ (2-4) × 10 14 cm −3 in the center of SMHGD. By measuring SMHGD disc voltages, the longitudinal distribution of plasma potential and electric field strength are determined.
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