Abstract
Spectral measurements of a laser-produced soft x-ray and EUV source based on a double-stream gas puff target are described. The target was irradiated with a Nd:glass laser producing 1 ns pulses with energy up to 10 J. Production in the wavelength range up to 20 nm (x-ray and EUV emissions) have been measured from xenon, krypton, argon, and nitrogen targets using the transmission grating spectrometer with the back-illuminated CCD. Spectral characteristics of x-ray and EUV emissions are presented.
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