Abstract
By the method of spectral ellipsometry with binary modulation of the polarization state the dispersions of the refractive index n, absorption coefficient k, and layer thickness in ZnS/ZnSe multilayer structures grown by the chemical gas‐phase deposition method from heteroorganic compounds on GaGaAs‐substrates with ZnSe buffer layers have been determined. The efficiency of local ellipsometric measurements (with a light beam size less than 150 × 500 μm) permitting mapping of the parameters of structures with A2B6 layers up to a few microns thick has been demonstrated. The optical properties of oxide layers formed on the zinc selenide surface have been investigated. Multilayer structures (ZnSe/ZnS)n/ZnSe/GaAs with a pronounced exciton absorption and specific features in the reflection spectra coinciding in energy with exciton transitions, as well as Bragg mirrors with a reflection coefficient up to 99% in the blue region of the spectrum, have been studied.
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