Abstract
In order to characterize the laser ablation process as it relates to the deposition of high Tc superconducting thin films, optical emission spectra produced during ArF excimer laser ablation of the high Tc superconductor YBa2Cu3O7 were studied. The population of excited states within the gas phase blow-off material depends strongly on excimer laser fluence at 193 nm. Ablation using relatively low excimer laser fluences produces a significant fraction of YO in the gas phase. The plasmas derived from ablation of targets made from the high Tc material are similar to plasmas observed from ablation of the individual components BaCO3, CuO, and Y2O3.
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