Abstract
UV supercontinuum laser sources based on resonant dispersive wave (RDW) generation in gas-filled hollow-core (HC) fibers offer an attractive architecture for numerous applications. However, the narrow UV spectral peak inherent to RDW generation limits the suitability for applications that require broad spectral coverage within the UV region such as spectroscopic scatterometry. In this Letter, we demonstrate how the UV spectrum can be shaped by modulating the peak power of the pump pulses driving the RDW generation, thereby creating a broadened and flattened UV spectrum. Using an argon-filled anti-resonant HC fiber, we generate a UV spectrum with a center wavelength of 323.6 nm with an FWHM of 51.7 nm, corresponding to a relative bandwidth of 16.1%.
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