Specimen charging and detection of signal from non-conductors in a cathode lens-equipped scanning electron microscope.

Abstract

This paper concerns the problems connected with the observation of a nonconductive specimen in a scanning electron microscope (SEM) when incident electrons create a surface charge and a corresponding electric field. The special configuration of the cathode lens enables one to control the landing energy of primary electrons via the specimen bias. In the cathode lens, the accelerating electric field at the surface of the specimen combines itself with that of the surface charge in influencing the trajectories of the signal electrons and hence the detected signal level and the possible recapturing of slow secondaries. Recaptured electrons reduce the ultimate positive surface potential, which arises when working below the higher critical energy of electron impact. Computer simulations of electron trajectories were performed for the typical cathode lens configuration and for a model specimen characterized by emission yields similar to those for glass. The simulations brought an extensive set of data about the trajectories of both secondary and backscattered electrons. Furthermore, the data were processed in order to assess the charge balance between the emitted and recaptured electrons as well as the collection efficiency of the detector. The results include values of the ultimate positive surface potential and the detected signal level, both in dependence on the initial energy of the electron impact and the size of the field of view. Finally, the method for the determination of critical energy is reevaluated. This is based on the measurement of the time dependence of the detected signal.