Abstract
The influence of the bottom electrode structure on the crystal structure and electrophysical properties of lead zirconate titanate thin films formed by chemical solution deposition is investigated. The role played by the processes of diffusion and oxidation of titanium, which result in a partial misorientation of columnar grains of the perovskite structure of the films, is elucidated. It is shown that the preliminary oxidation of titanium leads to an increase in the thermal stability of the metallization system. The influence of the interfaces in the Pt layer on the process of heterogeneous nucleation of perovskite grains is revealed.
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