Abstract
The field of test structures plays a major role in today’s semiconductor manufacturing processes. These processes have reached a degree of complexity which has never been seen before. Test structures are not only used early on during process development but also during all stages of the lifetime of a semiconductor manufacturing process. Since 1988, the International Conference on Microelectronic Test Structures (ICMTS) has been the main forum for the test structure community to present their latest achievements in the areas of test structure design, process characterization, parameter extraction, variability, matching, MEMS, yield as well as measurement methods and other test structure related areas. Historically, the conference sessions are held in a single thread over two and a half days.
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