Abstract
In contrast to many other optical methods the uncertainty of Coherence Scanning Interferometer (CSI) in vertical direction is independent from the field of view. Therefore CSIs are ideal instruments for measuring 3D-profiles of larger areas (36×28mm2, e.g.) with high precision. This is of advantage for the determination of form parameters like flatness, parallelism and steps heights within a short time. In addition, using a telecentric beam path allows measurements of deep lying surfaces (<70mm) and the determination of form parameters with large step-heights. The lateral and spatial resolution, however, are reduced. In this presentation different metrological characteristics together with their potential errors are analyzed for large-scale measuring CSIs. Therefore these instruments are ideal tools in quality control for good/bad selections, e.g. The consequences for the practical use in industry and for standardization are discussed by examples of workpieces of automotive suppliers or from the steel industry.
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