Abstract

In recent decades, a strong revival of non-equilibrium atmospheric pressure plasma studies has developed in the form of microplasmas. Microplasmas have typical scales of 1 mm or less and offer a very exciting research direction in the field of plasma science and technology as the discharge physics can be considerably different due to high collisionality and the importance of plasma–surface interaction. These high-pressure small-scale plasmas have a diverse range of physical and chemical properties. This diversity coincides with various applications including light/UV sources [1], material processing [2], chemical analysis [3], material synthesis [4], electromagnetics [5], combustion [6] and even medicine [7].At atmospheric pressure, large scale plasmas have the tendency to become unstable due to the high collision rates leading to enhanced heating and ionization compared to their low-pressure counterparts. As low-pressure plasmas typically operate in reactors with sizes of tens of centimetres, scaling up the pressure to atmospheric pressure the size of the plasma reduces to typical sizes below 1 mm. A natural approach of stabilizing atmospheric pressure plasmas is thus the use of microelectrode geometries.Traditionally microplasmas have been produced in confined geometries which allow one to stabilize dc excited discharges. This stabilization is intrinsically connected to the large surface-to-volume ratio which enhances heat transfer and losses of charged and excited species to the walls. Currently challenging boundaries are pushed by producing microcavity geometries with dimensions of the order of 1 µm [8]. The subject of this special issue, diagnostics of microplasmas, is motivated by the many challenges in microplasma diagnostics in view of the complex chemistry and strong spatial (and even temporal) gradients of species densities and plasma properties.Atmospheric pressure plasmas have a very long history dating back more than 100 years, with early work of, e.g. Werner von Siemens [9], who studied a dielectric barrier discharge (DBD) in the context of ozone generation. DBD discharges often consist of numerous filamentary discharges which are inherently transient in nature and with a characteristic size similar to the dimensions of microplasmas. Several groups are investigating the stabilization of such plasma filaments to perform temporal and spatial resolved diagnostics. To this end and due to the many similar challenges for diagnostics, this type of discharge is also included in this special issue.Research on microplasmas is performed in many groups spread all over the world, and a biannual workshop is devoted to the topic. The 7th edition of this International Workshop on Microplasmas was held in Beijing in May 2013. Large research programs consisting of clusters of research labs such as in Japan, Germany, France and the USA have been producing a wealth of information available in the literature.As the editors of this special issue, we are very pleased to have attracted a collection of excellent papers from leading experts in the field covering most of the current diagnostics performed in microplasmas. As an introduction to the regular special issue papers, a review paper is included [10]. It describes the key characteristics of atmospheric pressure plasmas and microplasmas in particular, and reviews the state of the art in plasma diagnostics. Special attention has been given in this review to highlighting the issues and challenges to probe microplasmas.The regular papers cover a large range of different diagnostics including coherent anti-Stokes Raman scattering (CARS) [11], (two-photon) laser induced fluorescence ((Ta)LIF) [12, 13, 18, 24], absorption spectroscopy [13–18], optical emission spectroscopy [12, 16–21, 24], imaging [22, 23], surface diagnostics [24, 25] and mass spectrometry [26, 27].Different aspects of microplasmas are broadly investigated from a perspective of diagnostics, modelling and applications. Diagnostics are pivotal to both the development of models and the optimization and exploration of novel applications. Consequently, this special issue is focused on the various aspects and challenges for diagnostics in microplasmas. In addition, previous special issues on the topic of microplasmas have already covered many aspects of source development, applications and modelling [28–31]. The reader who wishes to access additional background information on microplasmas is referred to the following review papers [32–35].We would like to thank all the contributors and the editorial staff who were of tremendous support in the preparation of this special issue. It is our sincere hope that you enjoy reading this special issue and that it will be a reference and helpful guidance for young researchers embarking in the field of microplasmas. The continued effort to increase our understanding of plasmas by modelling and diagnostics is of key importance for plasma science and the development of novel technologies.

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