Abstract
Sr0.5Ba0.5Nb2O6 (SBN) thin films were prepared on Pt-coated Si (Pt/Ti/SiO2/Si(100)) substrates by pulsed laser deposition. The influence of ambient gas type on the preparation of SBN thin films was studied. N2O gas was found to be more effective for improving the oxidation reaction during deposition under lower pressure than O2 gas because, under lower gas pressure, the ablated species can keep higher energy for improving the crystallinity of SBN thin films. Structure changes in SBN thin films have been investigated as a function of film thickness in the range of 0.1-1.2μm. Highly (001) oriented SBN layers have been obtained in thicker films.
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