Spatio-temporally resolved electron temperature in argon radio-frequency capacitive discharge at atmospheric pressure

Abstract

Due to the lack of convincing experimental evidence for electron information, there are still unclearly understood discharge phenomena in atmospheric pressure radio-frequency (rf) capacitive discharge, e.g. the electron heating, discharge structures, and the alpha–gamma mode transition. Thus, to perceive basic and meaningful principles with an unambiguous interpretation, simple and reliable electron diagnostics are required. Since bremsstrahlung emitted through electron-neutral atom interaction depends on electron density (ne) and temperature (Te), their diagnostic is possible. In particular, Te is easily estimated from the ratio of bremsstrahlung emissivities at two different wavelengths or more. In this paper, 2D Te distribution in an argon atmospheric pressure capacitive discharge measured by using a digital camera and optical band pass filters is described. Time-averaged Te in the bulk region obtained by a digital camera is consistent with that measured by an absolutely calibrated spectrometer. In addition, time-resolved emission spectra and the corresponding ne and Te during one rf cycle of the argon capacitive discharge are discussed. The result shows that Te varied from 2.3 to 3.0 eV, while ne did not change significantly.