Abstract

A particle-in-cell Monte Carlo collision algorithm has been developed to numerically investigate the three-dimensional structure of a parallel-plate direct current glow discharge. The discharge in argon under a low pressure of 42 mtorr has been simulated as taking place between two circular electrodes in a grounded rectangular chamber. The motion of ions and electrons was calculated in a self-consistent electric field, which was obtained from Poisson's equation by a fast Fourier transform algorithm at each electron time step. Spatial distributions and temporal behavior of the electric field and discharge macroparameters were analyzed. The oscillations and wavy structure of the discharge characteristics have been revealed.

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