Abstract
Effective droplet filtering without considerable loss of ablated material is demonstrated in the cross-beam pulsed laser deposition (CBPLD). Time-of-flight (TOF) measurements have been carried out with ion collectors in order to obtain kinetic energy distribution functions of ionized particles in the CBPLD plasma. The average and maximal kinetic energies of the ions in the CBPLD have proved to be of order 100 eV and 800 eV respectively, i.e., 2–3 times lower as compared to conventional PLD.
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