Abstract
Low temperature scanning electron microscopy (LTSEM) offers the possibility for spatially resolved investigations of microwave properties of single Josephson junctions, superconducting striplines, resonators, and complex cryoelectric circuits during their operation. The spatial resolution of about 1 μm is at least two orders of magnitude better than the typical wavelength (≳100 μm in the elements) in the frequency range of interest (50–500 GHz). We demonstrate that LTSEM is a well suited tool for the experimental investigation of superconducting microwave devices and cryoelectronic circuits.
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