Abstract
Spatially resolved distributions of excited species have been obtained for argon, oxygen, hydrogen and nitrogen in plasmas produced by electromagnetic surface waves in a pressure range never studied before (10–600 torr) using a tomography technique. The effect of the frequency of operation on the distribution of the excited species in surface-wave plasmas has been studied between 27 and 2450 MHz. These three-dimensional distributions have been examined in argon and in gas mixtures of argon—oxygen, argon—hydrogen and argon—nitrogen. In general for the surface-wave plasma, the radial distribution of electric field and electron density are the main parameters that seem to govern the radial distribution of excited species.
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