Abstract
In this paper, the separation of transduction effects on the basis of their spatial symmetry relations is presented. The current flow through a symmetrical device is made to spin in a stepwise manner. The output signal as a function of the spatial orientation is sampled and Fourier transformed. A 'spatial' frequency spectrum results, in which each distinct spatial symmetry relation is represented by a different Fourier coefficient. A finite-element model of the piezoresistive effect in the Laplace equation is used to verify the experimental results. In the symmetrical 16-contact Hall plate, the Hall effect is present in the a 0 coefficient and the π periodic stress in the c 2 coefficient in (100) oriented silicon. Geometric lithographic errors contribute to both c 2 and c 6.
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