Abstract
Spatial structures of charged particles in Ar/CF4 RF (13.56 MHz) capacitive discharges were investigated by changing the CF4 content up to 10% over the pressure range from 0.03 to 0.10 Torr, while keeping the discharge current at 250 mA. The ratio of negative ion to electron densities at the center was in the range from 2 to 12. The measured negative ions occupied the entire plasma region with a flat top profile at the center except at the pressure of 0.03 Torr and CF4 content lower than 5%, while the electron density distribution was uniform in the entire plasma region.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
