Abstract
The spatial resolution along the surface normal and the total depth probed are two important parameters in depth-controlled surface sensitive X-ray techniques employing grazing incidence geometry. The two parameters are analyzed in terms of optical properties (refractive indices) of the media involved and parameters of the incident X-ray beam: beam divergence, X-ray energy, and spectral bandwidth. We derive analytical expressions of the required beam divergence and spectral bandwidth of the incident beam as a function of the two parameters. Sample calculations are made for X-ray energies between 0.1 and 100 keV and for solid Be, Cu and Au, representing material matrices consisting of low, medium and high atomic number elements. A brief discussion on obtaining the required beam divergence and spectral bandwidth from present X-ray sources and optics is given.
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