Abstract
Experimental measurements of the spatial distribution of ionisation efficiency in a residual gas analyser (RGA) are presented. The efficiency was determined by scanning a focused helium-atom micro-probe across the active volume of the source. The spatial resolution is determined by the diameter of the focused atom beam, which was approximately 200 μm. The results give a direct explanation of the role of ion energy in the overall sensitivity of quadrupole RGA instruments.
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