Spatial distributions of metastable argon, temperature and electron number density in an inductively coupled argon plasma

Abstract

Spatially resolved radial distributions of excitation temperature and electron number density in an argon ICP were obtained. The argon excitation temperature and electron number density near the plasma center were found to 7000 K and 5 × 10 15 cm −3, respectively, at an RF power of 1.5 kW and a carrier argon flow rate 0.65 1 min −1. Various distributions of the absorbance at the Ar I 811.5 nm line, which has one of the metastable levels as the lower level, were obtained with and without carrier argon flow, where an MIP was used as a light source. Introduction of a large amount of potassium did not influence the distribution of the absorbance. The emission intensities at Ar I 811.5 nm were also measured for comparison.