Abstract
Spatial distributions of the desorption flow (SDDF) of CH4, N2 and azomethane (CH3N=NCH3) on molybdenum, O2 and N2 on indium, and N2 on iron were measured by TPD/TPR with angular resolution and described by the Comsa equation. The activation energy of chemisorption and the effect of the precursor state on the total desorption rate were estimated from the parameters of the Comsa equation. The pathway via a precursor state is the main one (60–90%) for oxygen on indium and for nitrogen and azomethane on molybdenum. For other systems, this pathway cannot be completely excluded either. According to our upper estimates, its contribution can be essential (∼40%).
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