Abstract
We present results on the spatial distribution of copper vapour flux in the three-dimensional flow behaviour region under identical experimental conditions as a function of the temperature of a two-dimensional (2D) evaporating source. These experimental results clearly show that, with increasing source temperature, atomic collision processes along the length and the width of a 2D source differ, which results in a differential collimation of atomic beam which can be evaluated using different beam exponents in these directions. A generalized function describing the spatial distribution of atomic vapour from a point as well as from a 2D source and deviation from Knudsen's cosine law is presented. With this distribution function, the experimentally measured vapour flux distribution from a 2D source as a function of temperature, described in terms of Knudsen numbers ranging from 1.2 to 0.23, could be fitted to an accuracy of ±5%.
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