Abstract
Narrowing of the discharge in wide-aperture transversely excited KrF excimer laser heads is shown as a result of the effect of the ground return at the outer boundary of the laser chamber on the electric field line distribution. It is shown theoretically and experimentally that it has a strong contribution to the electric field line distribution, while the electrode shape and separation are only of secondary importance. In order to avoid the narrowing effect, a compensated configuration is suggested.
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