Abstract
Schwarzschild objectives are used in the EUV spectral range because of their large aperture, high mechanical stability and excellent achromaticity. The large aperture results in a small, theoretically diffraction limited focus diameter with ideal values of below 200 nm with the current configuration. We employed a zone plate with matched numerical aperture (0.19) to image the focus onto an X-ray CCD camera. Emission from high harmonic generation and a liquid-jet laser-plasma were used as light sources. Images at magnifications of about 150-fold were acquired and focus diameters of 300 nm (FWHM) were observed.
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