Abstract
Antimony-doped tin oxide (ATO) nanoceramics used for sputtering targets are successfully prepared by spark plasma sintering (SPS) technology using commercial ATO nanoparticles with particle size of 10–15 nm. The effect of sintering temperature on the microstructure and electrical property of the obtained ATO nanoceramics is investigated. By means of XPS, the Sb5+/Sb3+ ratio of ATO nanoceramics sintered at different temperatures is determined. The results suggest that when the sintering temperature is 1000 °C, ATO nanoceramics show a density of 97.2% and electrical resistivity of 7.9 × 10−2 Ω cm which attribute to an elevated Sb5+/Sb3+ ratio. The main mechanism of conduction is explained through the carrier concentration determined on the antimony content and its oxidation state in the tin oxide lattice.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
