Abstract

We developed a thermo-optically controlled nonmechanical optical beam scanner using a Si photonic crystal slow-light waveguide with a diffraction grating to achieve on-chip light detection and ranging (LIDAR). This Letter applies pre-emphasis signals to the thermo-optic control, and the cutoff frequency increases to 500 kHz. Observing the beam scanning in the space-time domain showed that the turn-on and turn-off times of the scanner for a rectangular drive voltage were 10 µs and reduced to 2.7 µs when the pre-emphasis signals were optimized. This new, to the best of our knowledge, result enables a frame rate of 29 fps for 12,800 resolution points in LIDAR.

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