Abstract
The electret behaviour of anodic Ta 2O 5 films formed in H 3PO 4 electrolytes has been investigated by measuring the surface charge density with a Kelvin probe. The samples show a negative charge on the outer film surface which increases with the thickness of the film. In addition, an increase in the electrolyte concentration or the formation of a current density also give rise to a higher surface charge. The results have been interpreted in terms of the charge associated with the electrolyte species incorporated into the films during the anodization process.
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