SORPTION OF GASES BY VAPOR-DEPOSITED TITANIUM FILMS

Abstract

Results are summarized for an investigation of the sorption rates of gases on vapor-deposited titanium films. The usefulness of such films for ultrahigh speed vacuum pumping is appraised. The sorption of hydrogen, deuterium, oxygen, nitrogen, carbon monoxide, carbon dioxide, water vapor, helium, argon, and methane onto titanium films was measured for a variety of circumstances using techniques and apparatus developed for this specific purpose. The information obtained and techniques evolved in this study have shown that large-scale getter pumping is feasible and can be a very effective means of pumping many gases. Sticking fractions larger than 0.8 were obtained for hydrogen, deuterium, oxygen, nitrogen, carbon monoxide, and carbon dioxide. The experiments have shown that the sticking fraction for gases on vapor-deposited films is a function of the deposition conditions. There is strong evidence to support the supposition that conditions which favor the formation of a porous, fine-grained film structure with a large surface-to-volume ratio produce films with the highest sorption rates. The technique for measuring sticking fractions is new and in many respects unique. It utilizes a very large sorption surface, thus minimizing the perturbing effect of the instrumentation and evaporation apparatus and reducing the hazard of film contamination due to small leaks in the system or outgassing of system components. The method gives especially good accuracy for measurements of sticking fractions approaching unity. The quantity of gas adsorbed, the gas flux onto the getter surface, and the gas flux leaving the getter surface are measured directly. Any two of these three independent measurements can be used to determine the sticking fraction, thereby providing a means of checking the data. The evaporation techniques, substrate surface, and substrate area were chosen to very nearly duplicate the conditions likely to be encountered in the practical application of large-scale getter pumping. (auth)