Abstract

In order to characterize an atmospheric pressure helium microwave-induced plasma (M1P) and discuss the excitation mechanisms in the MIP, some spatial distributions of emission intensities of various species. of spectroscopic temperatures, and of electron number density have been determined for the helium M1P, and compared with those of the argon and mixed gas (helium/argon) MIP's sustained under the same operating conditions. The dependences of these parameters on the operating conditions of the M1P have been also examined. For the calculations of electronic excitation, rotational, and ionization temperatures, local thermodynamic equilibrium (LTE) in the M1P was assumed. However, these temperatures showed significant differences from each other. Based on the efficient excitation capability of the helium M1P, even for non-metallic elements, a metastable helium atom mechanism and/or a high-energy electron mechanism have been suggested here as the excitation mechanisms in the helium M1P.

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