Abstract

The chemical composition, refractive index, texture thermal stability and microstructure of the films, by evaporating T102 mixed with elements of TaO5, YO3, and Mo , at the substrates with temperature of room, 180°c and 250° c, were investigated. The results showed that chemical composition of the films is different corresponding to not only that of materials and substrate temperature but also the manufacturing device. Both thermal stability with respect to crystalline temperature and rnicrostructure were different due to both the substrate temperature and chemical composition of the films/or coating materials.

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