Abstract
Abstract EPR spectra of E′-centers for a-SiO2 implanted with B+, F+, 29Si+, P+, Ar+, Ti+, Cu+, Ag+, Sb+ and W+ at variable doses 6 × 1014 to 1 × 1018 ions/cm2 at energies ranging from 30 to 380 keV are presented. It is shown that the changes in the shape of the spectra can be interpreted in terms of local environment distortions of the E′-center due to the appearance of nearby interstitials and vacancies or the replacement of one of the atoms involved in the center by an implanted or recoiled one.
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