Abstract
Thin cermet films containing titanium and titanium oxides have been produced by implanting oxygen ions into thin titanium films. The effects of temperature and strain on the resistance of these films have been studied. Fairly large strain gauge factors (>10) have been measured and the structures are found to exhibit conduction characteristics similar to discontinuous films. It is further shown that at high temperatures (>250°C) the films increase their resistance irreversibly by over an order of magnitude, and this behaviour renders them unsuitable for many strain gauge applications.
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