Some aspects of plasma polymerization of fluorine‐containing organic compounds. II. Comparison of ethylene and tetrafluoroethylene

Abstract

AbstractPlasma polymerizations of ethylene and tetrafluoroethylene are compared. In the plasma polymerization of ethylene and of tetrafluoroethylene, glow characteristics play an important role. Glow characteristic is dependent on a combined factor of W/Fm, where W is discharge power and Fm is monomer flow rate. At higher flow rates, higher wattages are required to maintain “full glow.” In the plasma polymerization of tetrafluoroethylene, simultaneous decomposition of the monomer competes with plasma polymerization. Above a certain value of W/Fm, decomposition becomes the predominant reaction, and the polymer deposition rate decreases with increasing discharge power. ESCA results indicate that the plasma polymer of tetrafluoroethylene that is formed in an incomplete glow region (low W/Fm) is a hybrid of polymers of plasma polymerization and of plasma‐induced polymerization of the monomer. Polymers formed under conditions of high W/Fm to produce “full glow” are similar, regardless of the extent of decomposition of the monomer. They contain carbons with different numbers of F(CF3, CF2, >CF, >C<) and carbons bonded to other more electronegative substituents.